Scalable, Modular Three-Dimensional Silicon Microelectrode...

Micromachines 2018 / 08 Vol. 9; Iss. 9

Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating

Scholvin, Jörg, Zorzos, Anthony, Kinney, Justin, Bernstein, Jacob, Moore-Kochlacs, Caroline, Kopell, Nancy, Fonstad, Clifton, Boyden, Edward
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Volume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9090436
Date:
August, 2018
File:
PDF, 3.71 MB
english, 2018
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