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Atomic Layer Deposition: Circular Double-Patterning Lithography Using a Block Copolymer Template and Atomic Layer Deposition (Adv. Mater. Interfaces 16/2018)
Wan, Zhixin, Lee, Ha Jin, Kim, Hyun Gu, Jo, Gyeong Cheon, Park, Woon Ik, Ryu, Seung Wook, Lee, Han-Bo-Ram, Kwon, Se-HunVolume:
5
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201870078
Date:
August, 2018
File:
PDF, 3.78 MB
2018