High volume manufacturing of lasers and photo-diodes on 4...

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IEEE Transactions on Semiconductor Manufacturing 2018

High volume manufacturing of lasers and photo-diodes on 4 inch InP in GaAs IC wafer fabrication facility

Pal, Debdas, Zhao, Deyin, Cater, James
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Year:
2018
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2018.2867194
File:
PDF, 820 KB
english, 2018
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