A Superjunction LDMOS with Steps Buried Oxide
Wu, Lijuan, Yang, Hang, Zhang, Yinyan, Song, Yue, Yuan, Na, Lei, Bing, Wu, YiqingLanguage:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-018-6546-5
Date:
September, 2018
File:
PDF, 1.04 MB
english, 2018