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Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions
Jasulaneca, Liga, Kosmaca, Jelena, Meija, Raimonds, Andzane, Jana, Erts, DonatsVolume:
9
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.9.29
Date:
January, 2018
File:
PDF, 11.57 MB
english, 2018