Growth and mechanical properties of 111-oriented V...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 09 Vol. 36; Iss. 5

Growth and mechanical properties of 111-oriented V 0.5 Mo 0.5 N x /Al 2 O 3 (0001) thin films

Kindlund, Hanna, Lu, Jun, Broitman, Esteban, Petrov, Ivan, Greene, J. E., Birch, Jens, Hultman, Lars
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5045048
Date:
September, 2018
File:
PDF, 2.39 MB
english, 2018
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