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The Design and Characteristics of a 630-mm Phase-Shifting Interferometer
Silin, D. E., Kozhevatov, I. E., Kulikova, E. H., Pigasin, A. V., Speransky, S. B., Bel’kov, S. A., Derkach, I. N., Lobachev, D. I., Chernov, I. E.Volume:
61
Language:
english
Journal:
Instruments and Experimental Techniques
DOI:
10.1134/S0020441218020215
Date:
May, 2018
File:
PDF, 618 KB
english, 2018