Fabrication of carbon nanomembranes by helium ion beam lithography
Zhang, Xianghui, Vieker, Henning, Beyer, André, Gölzhäuser, ArminVolume:
5
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.5.20
Date:
February, 2014
File:
PDF, 1.28 MB
english, 2014