Development of Objective Aperture Holder for Mounting Compact Cs Corrector on Conventional SEM
Nomaguchi, Tsunenori, Motomura, Shunichi, Nishinaka, Kenichi, Agemura, Toshihide, Kawasaki, Tadahiro, Yoshida, Ryuji, Kato, TakeharuVolume:
24
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927618003720
Date:
August, 2018
File:
PDF, 750 KB
english, 2018