Effects of substrate temperature on the properties of the indium tin oxide thin films deposited by sputtering method
Wu, Chia-Ching, Diao, Chien-Chen, Tzou, Gow-YiVolume:
185
Year:
2018
Language:
english
Journal:
MATEC Web of Conferences
DOI:
10.1051/matecconf/201818500006
File:
PDF, 860 KB
english, 2018