Dielectric constant measurement using atomic force...

Applied Physics 2018 / 10 Vol. 124; Iss. 10

Dielectric constant measurement using atomic force microscopy of dielectric films: a system theory approach

Cruz-Valeriano, E., Guzmán-Caballero, D. E., Escamilla-Díaz, T., Gutierrez-Peralta, A., Davila, Susana Meraz, Torres-Ochoa, J. A., Arciniega, J. J. Gervacio, Murillo-Bracamontes, E. A., Enriquez-Flore
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Volume:
124
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-018-2093-4
Date:
October, 2018
File:
PDF, 1.97 MB
english, 2018
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