Aluminum plasmonic waveguides co-integrated with Si3N4...

Scientific Reports 2018 / 12 Vol. 8; Iss. 1

Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes

Dabos, George, Manolis, Athanasios, Tsiokos, Dimitris, Ketzaki, Dimitra, Chatzianagnostou, Evangelia, Markey, Laurent, Rusakov, Dmitrii, Weeber, Jean-Claude, Dereux, Alain, Giesecke, Anna-Lena, Porsch
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Volume:
8
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-018-31736-4
Date:
December, 2018
File:
PDF, 2.95 MB
english, 2018
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