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Analysis of amorphous-silicon deposition conditions in plasma-silane mixtures at low pressure
S. V. Petrov, E. P. Prokopiev, E. M. SokolovVolume:
19
Language:
english
Pages:
10
DOI:
10.1007/bf03185380
Date:
June, 1997
File:
PDF, 484 KB
english, 1997