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[IEEE 2018 41st International Spring Seminar on Electronics Technology (ISSE) - Zlatibor, Serbia (2018.5.16-2018.5.20)] 2018 41st International Spring Seminar on Electronics Technology (ISSE) - Investigation into the Characteristics of DC Nitrogen Plasma Used for Group III-N Semiconductor Thin-Film Growths
Kadikoff, Berek, Dubreuil, Robert, Tot, Jonny, Alexandrov, DimiterYear:
2018
Language:
english
DOI:
10.1109/ISSE.2018.8443696
File:
PDF, 1.93 MB
english, 2018