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Three wavelengths parallel phase-shift interferometry for real-time focus tracking and vibration measurement
Ney, Michael, Safrani, Avner, Abdulhalim, IbrahimVolume:
42
Language:
english
Journal:
Optics Letters
DOI:
10.1364/OL.42.000719
Date:
February, 2017
File:
PDF, 1.47 MB
english, 2017