Effect of annealing on structure and properties of Ta–O–N...

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Ceramics International 2018 / 9

Effect of annealing on structure and properties of Ta–O–N films prepared by high power impulse magnetron sputtering

Čapek, Jiří, Batková, Šárka, Haviar, Stanislav, Houška, Jiří, Čerstvý, Radomír, Zeman, Petr
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Language:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2018.09.019
Date:
September, 2018
File:
PDF, 11.29 MB
english, 2018
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