Field-Effect Device Using Quasi Two-Dimensional Electron Gas in Mass-Producible Atomic-Layer-Deposited Al2O3/TiO2 Ultrathin (< 10 nm) Film Heterostructure
Seok, Tae Jun, Liu, Yuhang, Jung, Hae Jun, Kim, Soo Bin, Kim, Dae Hyun, Kim, Sung Min, Jang, Jae Hyuck, Cho, Deok-Yong, Lee, Sang Woon, Park, Tae JooLanguage:
english
Journal:
ACS Nano
DOI:
10.1021/acsnano.8b05891
Date:
September, 2018
File:
PDF, 1.02 MB
english, 2018