Acceptor doping of β -Ga 2 O 3 by Mg and N ion implantations
Wong, Man Hoi, Lin, Chia-Hung, Kuramata, Akito, Yamakoshi, Shigenobu, Murakami, Hisashi, Kumagai, Yoshinao, Higashiwaki, MasatakaVolume:
113
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.5050040
Date:
September, 2018
File:
PDF, 1.18 MB
english, 2018