Characterization of SiC thin films deposited by HiPIMS

Materials Research 2014 / 04 Vol. 17; Iss. 2

Characterization of SiC thin films deposited by HiPIMS

Leal, Gabriela, Campos, Tiago Moreira Bastos, Silva Sobrinho, Argemiro Soares da, Pessoa, Rodrigo Sávio, Maciel, Homero Santiago, Massi, Marcos
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Volume:
17
Language:
english
Journal:
Materials Research
DOI:
10.1590/S1516-14392014005000038
Date:
April, 2014
File:
PDF, 1.69 MB
english, 2014
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