Facile and low-cost fabrication of uniform silicon micro/nanostructures by nanopitting-assisted wet chemical etching
Wang, Feng, Jiang, Shulan, Han, Jinghui, Guo, Guangran, Yu, Bingjun, Yang, Weiqing, Qian, LinmaoVolume:
13
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2018.0185
Date:
September, 2018
File:
PDF, 719 KB
english, 2018