Effect of pore generating materials on the electrical and...

Macromolecular Research 2007 / 02 Vol. 15; Iss. 1

Effect of pore generating materials on the electrical and mechanical properties of porous low-k films

Suhan Kim, Kookheon Char, Junhee Hahn, Jin-Kyu Lee, Do Yeung Yoon, Hee-Woo Rhee, Moon Young Jin
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Volume:
15
Language:
english
Pages:
4
DOI:
10.1007/bf03218744
Date:
February, 2007
File:
PDF, 575 KB
english, 2007
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