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Nanomechanical characterization of SU8/ZnO nanocomposite films for applications in energy-harvesting microsystems
Krishna, Braj, Chaturvedi, Abhishek, Mishra, Neelam, Das, KaushikLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aae10c
Date:
September, 2018
File:
PDF, 1.41 MB
english, 2018