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[IEEE 2018 13th IEEE Conference on Industrial Electronics and Applications (ICIEA) - Wuhan (2018.5.31-2018.6.2)] 2018 13th IEEE Conference on Industrial Electronics and Applications (ICIEA) - Levitation control system design for micromachined electrostatically suspended accelerometer
Qijun, Xiao, Zhonghui, LuoYear:
2018
Language:
english
DOI:
10.1109/ICIEA.2018.8397962
File:
PDF, 654 KB
english, 2018