![](/img/cover-not-exists.png)
Toxicological Investigations in the Semiconductor Industry: II. Studies on the Subacute Inhalation Toxicity and Genotoxicity of Gaseous Waste Products from the Aluminium Plasma Etching Process
Bauer, Siegfried, Werner, Nadeshda, Wolff, Ilona, Damme, Britt, Oemus, Kerstin, Hoffmann, PeterVolume:
8
Language:
english
Journal:
Toxicology and Industrial Health
DOI:
10.1177/074823379200800607
Date:
November, 1992
File:
PDF, 1021 KB
english, 1992