Electrical evaluation of the crystallization...

Japanese Journal of Applied Physics 2018 / 10 Vol. 57; Iss. 10

Electrical evaluation of the crystallization characteristics of excimer laser annealed polycrystalline silicon active layer

Koo, Kwangjun, Kim, Sangsub, Choi, Pyungho, Kim, Jaejin, Jang, Keunho, Choi, Byoungdeog
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.106503
Date:
October, 2018
File:
PDF, 3.16 MB
english, 2018
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