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Investigation of Sacrificial Layer Masking Fabrication of Dual-Frequency Quartz Crystal Microbalance
Xu, Zhangliang, He, Zhengqi, Yuan, Yong J.Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.09.026
Date:
September, 2018
File:
PDF, 686 KB
english, 2018