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Precise positioner utilizing rapid deformations of a piezoelectric element.
HIGUCHI, Toshiro, WATANABE, Masahiro, KUDOU, KenichiVolume:
54
Year:
1988
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.54.2107
File:
PDF, 831 KB
1988