Precise control of graphene etching by remote hydrogen plasma
Ma, Bangjun, Ren, Shizhao, Wang, Peiqi, Jia, Chuancheng, Guo, XuefengLanguage:
english
Journal:
Nano Research
DOI:
10.1007/s12274-018-2192-8
Date:
September, 2018
File:
PDF, 1.82 MB
english, 2018