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Irradiation of sputtered Al-Si-N coatings by pulsed 200 keV C+ ion beam
Remnev, G., Tarbokov, V., Pavlov, S., Konusov, F., Zenkin, S., Musil, J.Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.09.022
Date:
September, 2018
File:
PDF, 1.17 MB
english, 2018