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Characterization of Mg x Zn 1- x O Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor-Deposition using bis -Ethylcyclopentadienyl Magnesium
Nakamura, Atsushi, Yamamoto, Kenji, Ishihara, Junji, Aoki, Toru, Temmyo, JiroVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.7267
Date:
October, 2005
File:
PDF, 576 KB
english, 2005