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Comparative analysis of direct laser writing and nanoimprint lithography for fabrication of optical phase elements
Lightman, Shlomi, Gvishi, Raz, Hurvitz, Gilad, Arie, AdyVolume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.55.009724
Date:
December, 2016
File:
PDF, 978 KB
english, 2016