A Ru–Pt alloy electrode to suppress leakage currents of...

Nanotechnology 2018 / 11 Vol. 29; Iss. 45

A Ru–Pt alloy electrode to suppress leakage currents of dynamic random-access memory capacitors

Pyeon, Jung Joon, Cho, Cheol Jin, Jeong, Doo Seok, Kim, Jin-Sang, Kang, Chong-Yun, Kim, Seong Keun
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Volume:
29
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aaddbc
Date:
November, 2018
File:
PDF, 1.30 MB
english, 2018
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