Phase Modulation Homodyne Displacement Measuring...

Phase Modulation Homodyne Displacement Measuring Interferometer using Tunable Laser Diode as Light Source

ISHIGE, Masashi, MATSUURA, Fumio, KAWASUGI, Masaaki, HOSHINO, Yuuta, QUOC, Tuan BANH, AKETAGAWA, Masato
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Volume:
76
Year:
2010
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.76.673
File:
PDF, 1.31 MB
2010
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