Phase Modulation Homodyne Displacement Measuring Interferometer using Tunable Laser Diode as Light Source
ISHIGE, Masashi, MATSUURA, Fumio, KAWASUGI, Masaaki, HOSHINO, Yuuta, QUOC, Tuan BANH, AKETAGAWA, MasatoVolume:
76
Year:
2010
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.76.673
File:
PDF, 1.31 MB
2010