Characteristics of aluminum nitride films on hexagonal boron nitride buffer layers using various growth methods through metal organic chemical vapor deposition
Han, Min, Deul Ryu, Beo, Bok Ko, Kang, Hee Jo, Chang, Lim, Chang-hyun, Viet Cuong, Tran, Han, Nam, Hong, Chang-HeeLanguage:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2018.09.018
Date:
September, 2018
File:
PDF, 919 KB
english, 2018