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Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations
Bouaouina, Boudjemaa, Mastail, Cédric, Besnard, Aurélien, Mareus, Rubenson, Nita, Florin, Michel, Anny, Abadias, GrégoryVolume:
160
Language:
english
Journal:
Materials & Design
DOI:
10.1016/j.matdes.2018.09.023
Date:
December, 2018
File:
PDF, 11.83 MB
english, 2018