Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2018 / 12 Vol. 436
Structure, morphologies and mechanical properties study of Cr-Zr-N films
Feng, Xingguo, Zhang, Kaifeng, Zheng, Yugang, Zhou, Hui, Wan, ZhihuaVolume:
436
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2018.09.009
Date:
December, 2018
File:
PDF, 2.33 MB
english, 2018