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The change in the phase state of thin PZT layers in the region of the morphotropic phase boundary obtained by the RF magnetron sputtering with varying target-substrate distance
Pronin, V P, Dolgintsev, D M, Osipov, V V, Pronin, I P, Senkevich, S V, Yu Kaptelov, EVolume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012063
Date:
July, 2018
File:
PDF, 981 KB
english, 2018