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Effects on the Surface and Luminescence Properties of GaAs by SF6 Plasma Passivation
Xu, Yumeng, Gao, Xin, Zhang, Xiaolei, Qiao, Zhongliang, Zhang, Jing, Zhou, Lu, Bo, BaoxueVolume:
8
Language:
english
Journal:
Crystals
DOI:
10.3390/cryst8090339
Date:
August, 2018
File:
PDF, 2.61 MB
english, 2018