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An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy
Li, Haijun, Duan, Xiyu, Li, Gaoming, Oldham, Kenn, Wang, ThomasVolume:
8
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi8050159
Date:
May, 2017
File:
PDF, 5.66 MB
english, 2017