Structural Designing of a MEMS Capacitive Accelerometer for...

Sensors 2018 / 02 Vol. 18; Iss. 2

Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity

He, Jiangbo, Zhou, Wu, Yu, Huijun, He, Xiaoping, Peng, Peng
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Journal:
Sensors
DOI:
10.3390/s18020643
Date:
February, 2018
File:
PDF, 3.94 MB
english, 2018
Conversion to is in progress
Conversion to is failed