Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2018 / 12 Vol. 436
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Defects in hydrogen implanted SiC
Zhang, Xiaodong, Li, Qian, Wang, Mao, Zhang, Zhitao, Akhmadaliev, Shavkat, Zhou, Shengqiang, Wu, Yiyong, Guo, BinVolume:
436
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2018.09.020
Date:
December, 2018
File:
PDF, 442 KB
english, 2018