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Development of MEMS-based thermal mass flow sensors for high sensitivity and wide flow rate range
Kang, Woong, Choi, Hae-Man, Choi, Yong-MoonVolume:
32
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-018-0822-4
Date:
September, 2018
File:
PDF, 1.49 MB
english, 2018