Preparation of AlSb thin films by magnetron sputtering...

Materials Science in Semiconductor Processing 2019 / 01 Vol. 89

Preparation of AlSb thin films by magnetron sputtering technology and its deliquescence mechanism

Song, Huijin, Gu, Peng, Zhu, Xinghua, Yan, Qiang, Yang, Dingyu
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Volume:
89
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.09.005
Date:
January, 2019
File:
PDF, 1.43 MB
english, 2019
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