An X-ray photoelectron spectroscopy study of the target...

Surface and Coatings Technology 2018 / 11 Vol. 353

An X-ray photoelectron spectroscopy study of the target surface composition after reactive magnetron sputtering

Schelfhout, R., Strijckmans, K., Depla, D.
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Volume:
353
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.09.002
Date:
November, 2018
File:
PDF, 905 KB
english, 2018
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