MOCVD growth of InGaP/GaAs HBT on 200mm Si wafers for...

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Semiconductor Science and Technology 2018 / 09

MOCVD growth of InGaP/GaAs HBT on 200mm Si wafers for heterogeneous Integration with Si CMOS

Loke, Wan Khai, Lee, Kwang Hong, Wang, Yue, Tan, Chuan Seng, Fitzgerald, Eugene A, Yoon, Soon Fatt
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Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/aae247
Date:
September, 2018
File:
PDF, 1.03 MB
english, 2018
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