Research on Nonlinear Dynamics of Drive Mode in Z -Axis Silicon Microgyroscope
Xu, Lu, Li, Hongsheng, Liu, Jia, Ni, Yunfang, Huang, LibinVolume:
2014
Year:
2014
Language:
english
Journal:
Journal of Sensors
DOI:
10.1155/2014/801618
File:
PDF, 2.19 MB
english, 2014