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Efficient ion-slicing of InP thin film for Si-based hetero-integration
Lin, Jiajie, You, Tiangui, Wang, Mao, Huang, Kai, Zhang, Shibin, Jia, Qi, Zhou, Min, Yu, Wen-Jie, Zhou, Shengqiang, Wang, Xi, Ou, XinLanguage:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aae281
Date:
September, 2018
File:
PDF, 1.07 MB
english, 2018