Characterization of Wafer-Bonded Oxide-Free Silicon with...

ECS Transactions 2018 / 07 Vol. 86; Iss. 5

Characterization of Wafer-Bonded Oxide-Free Silicon with Surfaces Treated with an Ion-Bombardment Procedure

Liao, Michael, Li, Chao, Flötgen, Christoph, Goorsky, Mark S.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08605.0055ecst
Date:
July, 2018
File:
PDF, 298 KB
english, 2018
Conversion to is in progress
Conversion to is failed