Pole Assignment Control of MIMO Motion Systems with...

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IEEE/ASME Transactions on Mechatronics 2018

Pole Assignment Control of MIMO Motion Systems with Flexible Structures and Its Application to an Ultra-Precision Wafer Stage

Huang, Tao, Yang, Kaiming, Yu, Zhu, Tang, Qian, Liu, Fei, Wang, Yi
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Year:
2018
Language:
english
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/TMECH.2018.2866238
File:
PDF, 2.03 MB
english, 2018
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