Low Temperature Microwave Anneal in FinFET Fabrication

ECS Transactions 2018 / 07 Vol. 86; Iss. 8

Low Temperature Microwave Anneal in FinFET Fabrication

Kassim, Joseph, Lee, Rinus T.P., Krishnan, Rishikesh, Ferrer, Domingo, Yang, Jie, Shusterman, Yuriy, Ramirez, Isreal, Liu, Huang, Lui, Jinping, Krishnan, Bharat
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Volume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08608.0011ecst
Date:
July, 2018
File:
PDF, 11.09 MB
english, 2018
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